Front-End Process Design Rules Gate Oxide and Diffusion NWELL Deep NWELL Native Device High Vt NMOS High Vt PMOS High Vt NMOS High Vt PMOS Low Vt NMOS Low Vt PMOS Thick Oxide Device Poly NPLUS PPLUS Resist Protection Oxide Back-End Process Design Rules Contact Metal VIA Thin Metal Large VIA Thick Metal Tags: 90нм, design rules
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